Camfil – a global leader in air filters and clean air solutions
For more than half a century, Camfil has been helping people breathe cleaner air. As a leading manufacturer of premium clean air solutions, we provide commercial and industrial systems for air filtration and air pollution control that improve worker and equipment productivity, minimize energy use, and benefit human health and the environment. We firmly believe that the best solutions for our customers are the best solutions for our planet, too. That’s why every step of the way – from design to delivery and across the product life cycle – we consider the impact of what we do on people and on the world around us. Through a fresh approach to problem-solving, innovative design, precise process control and a strong customer focus we aim to conserve more, use less and find better ways – so we can all breathe easier.
The Camfil Group is headquartered in Stockholm, Sweden, and has 31 manufacturing sites, six R&D centres, local sales offices in 35+ countries, and about 5,200 employees and growing. We proudly serve and support customers in a wide variety of industries and in communities across the world. To discover how Camfil can help you to protect people, processes and the environment, visit us at www.camfil.com.
Clean Air Solutions for Microelectronics
We keep pace with contamination control technology, so you can drive better device performance. Protect your sensitive electronics and optical devices and your processes from hazardous particles. Our clean room filters give you the particulate removal you need while providing energy and cost savings.
With nearly 20 years’ experience in microelectronics and semiconductor contamination control, we help you safeguard wafers and semiconductors, process equipment, disk drives, printed circuit boards, FPDs and solar panels.
Business-critical solutions for semiconductor manufacturing
Improve your process yield with complete solutions for advanced semiconductor manufacturing.
In semiconductor fabs, microcontamination can pose massive problems. Camfil offers an extensive range of solutions – particle pre-filters, HEPA and ULPA filters and AMC control solutions – to lower any clean room particulate and molecular concentrations to ISO Class 1 levels for particles and sub-ppb for AMC.
AMC FILTERS AND CONTROL MORE CRITICAL THAN EVER IN CLEAN ROOM FILTRATION
Airborne molecular contamination (AMC) presents a special challenge to semiconductor manufacturing in small dimensions. The undesired chemical reactions of acids, bases, organics, refractories and dopants can affect wafer surfaces and process equipment optics to create defects during chip production and reduced equipment and tool efficiency.
AMC is steadily becoming more important in critical clean room manufacturing processes. As specifications become more demanding and device sizes shrink, process control faces tremendous pressure. Wafers can spend an entire month inside a factory, undergoing hundreds of processes before being shipped in a final product. Any tiny contamination impact in this process chain can have serious consequences for the fab’s overall yield.
Another challenge lies in the generalization of larger wafer dimensions, which drives up the cost of individual wafers and increases the need for nanoparticle and AMC protection at the tool level. Additionally, the rising costs for defect-free masks used in EUV and multi-patterning DUV lithography are putting pressure on contamination control systems for facilities as well as mini-environments like inspection equipment and mask stockers.
PROTECT YOUR PROCESS, EQUIPMENT AND WAFERS AGAINST NANOPARTICLES AND AIRBORNE MOLECULAR CONTAMINANTS
Camfil solutions provide field- and lab-proven protection in semiconductor manufacturing environments, including lithography, etch, diffusion, metallization, thin films, ion implantation, inspection tools, and reticle or wafer storage areas.
Process tool air filters
Cleanroom air filters
Scanner prefiltration systems
ENERGY-EFFICIENT AND LOW-OUTGASSING SOLUTIONS FOR FACILITY SYSTEMS
Camfil’s particle pre-filter range ensures the lowest energy usage in make-up air handling units while protecting HEPA filters from clogging and without releasing Boron. Camfil HEPA and ULPA filters are designed to release the lowest possible amounts of organic contaminants (so-called low outgassing), following years of developments of adhesives and media chemical properties. Exhaust systems for wafer cutting as well as gas scrubbers for general exhaust back-up systems protect the environment from process contamination.
Boron-free synthetic pre-filters
Very low energy pre-filters
Low outgassing HEPA and ULPA filters
Dust collectors and gas scrubbers for cleaner exhaust air